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ET Series - High Voltage Power Supply

The ET Series of 2000 watt high voltage supplies feature flexible embedded controls with low ripple and noise. They are air insulated, fast response units, with tight regulation and extremely low arc discharge currents.

Typical Applications

Semiconductor Fabrication Equipment
Ion Implantation
Physical Vapor Deposition
Electron Beam Lithography

Products

Data Sheets

Technical Information

Products


Series	Max. Output Voltage	Max. Output Current	Max. Output Power	Input Voltage	Ripple better than
ET1R2000	0 – 1 kV	2000 mA	2 kW	Single Phase	0.025%
ET1.5R1300	0 – 1.5 kV	1300 mA	2 kW	Single Phase	0.025%
ET2R1000	0 – 2 kV	1000 mA	2 kW	Single Phase	0.025%
ET3R660	0 – 3 kV	660 mA	2 kW	Single Phase	0.025%
ET5R400	0 – 5 kV	400 mA	2 kW	Single Phase	0.025%
ET6R330	0 – 6 kV	330 mA	2 kW	Single Phase	0.025%

ET8X250	0 – 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8P250	0 – 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8N250	0 – 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8R250	0 – 8 kV	250 mA	2 kW	Single Phase	0.025%

ET10X200	0 – 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10P200	0 – 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10N200	0 – 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10R200	0 – 10 kV	200 mA	2 kW	Single Phase	0.025%

ET12X165	0 – 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12P165	0 – 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12N165	0 – 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12R165	0 – 12 kV	165 mA	2 kW	Single Phase	0.025%

ET15X132	0 – 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15P132	0 – 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15N132	0 – 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15R132	0 – 15 kV	132 mA	2 kW	Single Phase	0.025%

ET20X100	0 – 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20P100	0 – 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20N100	0 – 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20R100	0 – 20 kV	100 mA	2 kW	Single Phase	0.025%

ET25X80	0 – 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25P80	0 – 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25N80	0 – 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25R80	0 – 25 kV	80 mA	2 kW	Single Phase	0.025%

ET30X66	0 – 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30P66	0 – 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30N66	0 – 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30R66	0 – 30 kV	66 mA	2 kW	Single Phase	0.025%

ET40X50	0 – 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40P50	0 – 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40N50	0 – 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40R50	0 – 40 kV	50 mA	2 kW	Single Phase	0.025%

ET50X40	0 – 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50P40	0 – 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50N40	0 – 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50R40	0 – 50 kV	40 mA	2 kW	Single Phase	0.025%

ET60X33	0 – 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60P33	0 – 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60N33	0 – 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60R33	0 – 60 kV	33 mA	2 kW	Single Phase	0.025%

Data Sheets

Technical Information

ET Series - High Voltage Power Supply

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