Apex RF Plasma Generators Manufacturer & Suppliers in Germany

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Apex - RF Plasma Generators

High-Power Density for Compact Installation

When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on.

  • Chamber-, rack-, or frame-mount options for convenience and reduced power losses
  • Superb performance enhanced with arc management
  • 1.5 to 10 kW output power options at 13.56 MHz frequency
Slide
Apex – RF Plasma Generators

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

Slide
Apex – RF Plasma Generators in Germany

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

Slide
Apex – RF Plasma Generators in Suppliers

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

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