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Paramount Plus - RF Plasma Generators
Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Paramount Plus offers progressive technology and customizable features that include premier pulsing control.
- Precise RF and pulse control
- Fast response to plasma changes
- Built-in diagnostic tools
• Enhanced RF stability, tightly regulated power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance measurement
• Advanced FastDAQ data acquisition system
• Enhanced RF stability, tightly regulated power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance measurement
• Advanced FastDAQ data acquisition system
• Enhanced RF stability, tightly regulated power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance measurement
• Advanced FastDAQ data acquisition system
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
Benefits
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
| Power Level Paramount Plus MF: 5 and 15 kW Paramount Plus VHF: 3 and 6 kW Frequencies Paramount Plus MF: 2 MHz, freq. tuning ± 10% Paramount Plus VHF: 27, 40 and 60 MHz, freq. tuning ± 5% Available Interfaced RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT AC Input Paramount Plus MF: 200/240 VAC, 400/480 VAC Paramount Plus VHF: 200/240 VAC, 400/480 VAC |
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Paramount Plus Series Datasheet