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Apex – RF Plasma Generators

High-Power Density for Compact Installation

When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on.

  • Chamber-, rack-, or frame-mount options for convenience and reduced power losses
  • Superb performance enhanced with arc management
  • 1.5 to 10 kW output power options at 13.56 MHz frequency

SPS Series

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

AA Series

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

AA Series

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

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Overview
Technical Specs
Data Sheets
Overview

The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.

      Benefits

  • Readily integrate process tools with enhanced flexibility
  • Stabilize plasma operation
  • Improve yield for fast arc management
  • Easily customize and configure to your process requirements

Technical Specs

Power Level
1.5, 3 and 5.5 kW

Frequencies
13 MHz

Available Interfaces
RS-232, 25-pin analog, Ethernet, DeviceNet

AC Input
208VAC

Line Frequency
50/60 Hz

Cooling
Water

Ambient Air Temp. Range
+5 to +40°C

Cooling Water Temp. Range
+5 to +35°C

Advanced Features
Pulsing, CEX

 

Data Sheets

Apex Generator Datasheet

Apex and Paramount RF Generator Comparison