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Cesar - RF Plasma Generators
Unparalleled Breadth of RF-Application Delivery without Custom Lead Times
Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs.
- Customized performance without custom lead times
- Reliable design for maximum uptime
- Powerful user interface for easy operation
- Compact, streamlined design and standard platform packaging for easy replacement
- High efficiency — less heat generated
- RS-232, Ethernet, and Profibus communication
- Active front panel with convenient, comprehensive operating menu
- CEX (phase synch) operation mode
The proven Cesar platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.
Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high quality components, Cesar RF generators maximize reliability and productivity.
Benefits
- Increase process uptime thanks to highly reliable design and quality components
- Customize performance without custom-unit lead times
- Enhance operational ease and flexibility
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Cesar Datasheet