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HiLight - RF Plasma Generators

A Compact, Economical, Easy to Install, Low Power RF Platform

Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.

  • Economical
  • Flexible, single-phase input
  • Compact design
 

Features

  • Compact, lightweight shoebox design
  • Air cooling, Analog user port
  • Wave and pulse mode
  • Phase synchronization (CEX) and pulsing