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Navigator II - RF Match Networks

Rapid, Accurate, and Reliable Digitally-Tuned Matching

The Navigator ll matching network’s advanced digital technology speeds tuning and match response time.

  • Leading RF plasma methodology and control
  • Advanced pulsing control with tune-while-pulsing capability
  • Unprecedented insights into plasma with the integrated Z’Scan II
SPS Series

• Digital architecture with model-based rapid   tuning algorithms
• Pulsed RF power delivery
• Sweep frequency operation
• Intermodulation distortion (IMD) immunity   for multi-frequency applications
• Real-time process power and impedance   measurement

AA Series

• Digital architecture with model-based rapid   tuning algorithms
• Pulsed RF power delivery
• Sweep frequency operation
• Intermodulation distortion (IMD) immunity   for multi-frequency applications
• Real-time process power and impedance   measurement

• Digital architecture with model-based rapid   tuning algorithms
• Pulsed RF power delivery
• Sweep frequency operation
• Intermodulation distortion (IMD) immunity for   multi-frequency applications
• Real-time process power and impedance   measurement

• Digital architecture with model-based rapid tuning   algorithms
• Pulsed RF power delivery
• Sweep frequency operation
• Intermodulation distortion (IMD) immunity for   multi-frequency applications
• Real-time process power and impedance   measurement

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