PDX - RF Plasma Generators - HVP

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PDX – RF Plasma Generators

Proven, Mid-Frequency Workhorse with Industry-Leading Reliability

The PDX series features mid frequency power supplies that enhance process flexibility and optimize control.

  • Available in power ranging from 1250 to 8000 W
  • Wide frequency range operation
  • Remote operation capabilities

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SPS Series

Features

• Sinusoidal RF output for low harmonic   distortion
• Low EMI/RFI, Tightly regulated output   power
• Robust frequency range for optimal   process control

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AA Series

Features

• Sinusoidal RF output for low harmonic   distortion
• Low EMI/RFI, Tightly regulated output   power
• Robust frequency range for optimal   process control

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Overview
Data Sheets
Overview

Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency range of operation delivers optimal control across numerous applications.

The PDX low-power (LP) series is available in 1250 W and 1400 W versions and the PDX high-power (HP) series is available in 5000 W and 8000 W versions.

     Benefits

  • Enhance process flexibility
  • Improve throughput
  • Optimize process control
  • Ensure high repeatability
  • Ease integration

Data Sheets

PDX Low Power Series Datasheet

PDX High Power Series Datasheet